In-situ grown CuO and ZnO nanowire (NW) arrays were evaluated for their gassensing performance. The metal structures were fabricated by standard e-beamlithography, thermal evaporation and lift-off process onto a silicon substratewith gold electrodes. After integration onto a test structure with resistiveheater and thermocouple for temperature control, the samples were thermallyoxidized at 400°C. During thermal oxidation, nanowires were grownbetween the oxidized metal structures. The gas sensing performance of the NWarray was tested for carbon monoxide, - and a hydrocarbon-mixture (acetylene,ethane, ethene, and propene) at three relative humidity levels.