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Study of the Orientation of Y1Ba2cu/3O7−x Thin Films In-Situ Prepared by Reactive Coevaporation With RF Activated Oxygen-Ozone Plasma.

Published online by Cambridge University Press:  16 February 2011

M. Nagata ,
H. Nojima ,
H. Shintaku  and
M. Koba
M. Nagata
Affiliation:
Corporate Research and Development Group, SHARP CORPORATION, 2613-1, Ichinomoto-cho, Tenri, Nara 632, JAPAN
H. Nojima
Affiliation:
Corporate Research and Development Group, SHARP CORPORATION, 2613-1, Ichinomoto-cho, Tenri, Nara 632, JAPAN
H. Shintaku
Affiliation:
Corporate Research and Development Group, SHARP CORPORATION, 2613-1, Ichinomoto-cho, Tenri, Nara 632, JAPAN
M. Koba
Affiliation:
Corporate Research and Development Group, SHARP CORPORATION, 2613-1, Ichinomoto-cho, Tenri, Nara 632, JAPAN
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Abstract

Superconducting films of Y1Ba2Cu3O7−x have been prepared in-situ onto SrTiO3 (100) substrates by reactive coevaporation with rf activated oxygenozone plasma. Crystal quality and orientation of the films were evaluated as a function of substrate temperature(Ts). The films evaporated at Ta between 680°C, and 690°C had an a,b-axis orientation perpendicular to the substrate. The zero resistance temperature(Tc) of the film evaporated at Ts, of 690°C was 80K. The films evaporated at Ta above 700°C had c-axis orientation. The Ts of the film evaporated at a Ts, of 710°C was 90K.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 223: Symposium E – Low Energy Ion Beam and Plasma Modification of Materials , 1991 , 153
Copyright
Copyright © Materials Research Society 1991

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