Micromirrors Fabricated by the Micro-Origami Technique Characterized by Optical Actuation

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Type: Research/Researchers
Information: MRS Bulletin , Volume 29 , Issue 1: Toward Applications of Ceramic Nanostructures , January 2004 , pp. 5

DOI: https://doi.org/10.1557/mrs2004.6 [Opens in a new window]

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Micromirrors Fabricated by the Micro-Origami Technique Characterized by Optical Actuation

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Micromirrors Fabricated by the Micro-Origami Technique Characterized by Optical Actuation

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