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Spatial distributions of plasma parameters in conventional magnetron discharges in presence of nanoparticles

Published online by Cambridge University Press:  16 October 2020

A. Chami  and
C. Arnas Open the ORCID record for C. Arnas [Opens in a new window]
A. Chami
Affiliation:
Aix-Marseille université, CNRS, PIIM, 13397 Marseille, France
C. Arnas*
Affiliation:
Aix-Marseille université, CNRS, PIIM, 13397 Marseille, France
*
†Email address for correspondence: cecile.arnas@univ-amu.fr
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Abstract

Two-dimensional spatial measurements of magnetic field and plasma parameters have been performed in conventional magnetron DC discharges during the formation of metallic nanoparticles. Correlations between the electron density and temperature distributions, and the magnetic field geometry and strength have been established. A sharp increase of the plasma potential is found on the edge of the last magnetic arch followed by a decrease towards the anode plate and edges. It is shown that the spatial variation of the plasma potential is at the origin of a potential well that can trap negatively charged nanoparticles.

Keywords

electric dischargesdusty plasmasplasma diagnostics

Information

Type
Research Article
Information
Journal of Plasma Physics , Volume 86 , Issue 5 , October 2020 , 905860512
Copyright
Copyright © The Author(s), 2020. Published by Cambridge University Press

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