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Thermodynamic Study of Silane-hydrogen Chemical System

Published online by Cambridge University Press:  28 February 2011

Rajendra I. Patel
Rajendra I. Patel*
Affiliation:
Electronic and Information Sector Laboratories 3M Company St. Paul, Minnesota 55144
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Abstract

The thermodynamic calculations of chemical equilibrium compositions of various species were performed for silane-hydrogen system at different temperatUres [500-6000K], pressures [0.01-10 Torr], and mixing ratios [various silane fractions]. The effect of dopant impurities such as diborane and phosphine on equilibrium concentration profiles of various gaseous, tonic, and condensed species was also investigated. These data will be very useful in understanding the deposition chemistry of silane chemical systems and will be a valuable aid in optimization studies.

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References

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