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Synthesis and electrical characterization of ZnO and TiO2 thin films and their use as sensitive layer of pH field effect transistor sensors

Published online by Cambridge University Press:  22 August 2014

Jessica C. Fernandes  and
Marcelo Mulato
Jessica C. Fernandes
Affiliation:
Department of Physics, FFCLRP/University of São Paulo, Av. Bandeirantes, 3900 – Ribeirão Preto/São Paulo – Brazil
Marcelo Mulato
Affiliation:
Department of Physics, FFCLRP/University of São Paulo, Av. Bandeirantes, 3900 – Ribeirão Preto/São Paulo – Brazil
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Abstract

Oxide thin films of zinc and titanium materials were deposited by different deposition techniques, to be applied as sensitive layers of pH sensor – EGFET device. The deposition techniques tested were dip-coat, spin-coat, electrodeposition and spray-pyrolysis. The routine and the parameters of each technique were changed aiming optimized the procedures. The pHs buffer solutions tested ranged from 2 to 12. ZnO thin film shows sensitivity about 23 mV/pH, while TiO2 thin films shows only 13.8 mV/pH. The final purpose of this study is to optimize the parameters for each deposition technique for both oxide materials.

Keywords

coatingelectrical propertiessensor

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References

REFERENCES

Larbi, T., Ouni, B., Boukachem, A., Boubaker, K., and Amlouk, M., “Electrical measurements of dielectric properties of molybdenum-doped zinc oxide thin films,” Mater. Sci. Semicond. Process., vol. 22, pp. 50–58, Jun. 2014.CrossRefGoogle Scholar
Mishra, S. K., Rani, S., and Gupta, B. D., “Surface plasmon resonance based fiber optic hydrogen sulphide gas sensor utilizing nickel oxide doped ITO thin film,” Sensors Actuators B Chem., vol. 195, pp. 215–222, May 2014.CrossRefGoogle Scholar
van der Schoot, B. H. and Bergveld, P., “ISFET based enzyme sensors,” Biosensors, vol. 3, no. 3, pp. 161–186, 1987.CrossRefGoogle ScholarPubMed
Olthuis, W., Robben, M. A. M., Bergveld, P., Bos, M., and van der Linden, W. E., “pH sensor properties of electrochemically grown iridium oxide,” Sensors Actuators B Chem., vol. 2, no. 4, pp. 247–256, Oct. 1990.CrossRefGoogle Scholar
Kim, T. Y. and Yang, S., “Fabrication method and characterization of electrodeposited and heat-treated iridium oxide films for pH sensing,” Sensors Actuators B Chem., vol. 196, pp. 31–38, Jun. 2014.CrossRefGoogle Scholar
Yoldas, B. E., “Hydrolysis of titanium alkoxide and effects of hydrolytic polycondensation parameters,” J. Mater. Sci., vol. 21, no. 3, pp. 1087–1092, Mar. 1986.CrossRefGoogle Scholar
Pauporté, T. and Lincot, D., “Hydrogen peroxide oxygen precursor for zinc oxide electrodeposition II—Mechanistic aspects,” J. Electroanal. Chem., vol. 517, no. 1–2, pp. 54–62, Dec. 2001.CrossRefGoogle Scholar
Yao, P-C., Lee, M-C-, and Chiang, J-L.. (2014). Annealing Effect of Sol-gel TiO2 Thin Film on pH-EGFET Sensor. Presented at Internacional Symposium on Computer, Consumer and Control.Google Scholar
Habibi, M-H., and Sardashti, M. K.. “Structure and Morphology of Nanostructured Zinc Oxide Thin Films Prepared by Dip- vs. Spin-Coating Methods” J. Iran. Chem. Soc., vol. 5, no. 4, pp. 603–609, Dec. 2009.CrossRefGoogle Scholar
Nouri, E., et al. . “A comparative study of heat treatment temperature influence on the thickness of zirconia sol-gel thin films by three different techniques: SWE, SEM and AFM” Surf. & Coat. Tech., vol. 206, pp. 3809–3815, 2012.CrossRefGoogle Scholar