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Single Asperity Chemical Mechanical Wear Studied by Atomic Force Microscopy

Published online by Cambridge University Press:  01 February 2011

Forrest Stevens ,
Steve Langford  and
J. Thomas Dickinson
Forrest Stevens
Affiliation:
Physics Department, Washington State University Pullman, WA 99164-2814
Steve Langford
Affiliation:
Physics Department, Washington State University Pullman, WA 99164-2814
J. Thomas Dickinson
Affiliation:
Physics Department, Washington State University Pullman, WA 99164-2814
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Abstract

Nanometer scale wear caused by a single asperity of silicon nitride was examined by measuring the wear caused by atomic force microscope tips translated against sodium trisilicate glass, soda-lime glass, or fused silica in aqueous solutions. As a function of contact force, FN, and scan duration, t, the wear to both tip and substrate scales approximately as (FNt)0.5. Substrate wear was independent of temperature from 5°C to 60°C, whereas tip wear showed a temperature dependence on soda-lime glass corresponding to an activation energy of 60 kJ/mol on soda-lime glass.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 767: Symposium F – Chemical-Mechanical Planarization , 2003 , F2.1
Copyright
Copyright © Materials Research Society 2003

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References

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