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Properties of Transparent Conductive Oxide Films on FlexibleSubstrates

Published online by Cambridge University Press:  26 February 2011

Shih Hsiu Hsiao ,
Yoshikazu Tanaka  and
Ari Ide-Ektessabi
Shih Hsiu Hsiao
Affiliation:
shhsiao@t05.mbox.media.kyoto-u.ac.jp, Kyoto University, Mechanical Engineering and Science, Yoshida-Honmachi, Sakyo-ku, Kyoto, 606-8317, Japan, 81-75-753-5257
Yoshikazu Tanaka
Affiliation:
yoshikazu@t04.mbox.media.kyoto-u.ac.jp, Kyoto University, Mechanical Engineering and Science, Kyoto, 606-8317, Japan
Ari Ide-Ektessabi
Affiliation:
h51167@sakura.kudpc.kyoto-u.ac.jp, Kyoto University, International Innovation Center, Kyoto, 606-8317, Japan
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Abstract

Transparent conductive oxide (TCO) thin films are extensively used indisplay industry and they can be utilized for flexible displays. The polymerand the plastic materials used as flexible substrates are more bendable andlighter weight compared to glass substrates. However, its mechanical andsurface properties differed from glass substrates result in differentquality of TCO layers deposited on it. In this study, PolyethyleneTerephthalate (PET) and glass were used as substrates. Indium Tin Oxide(ITO), Zinc Oxide (ZnO), Mg-doped ZnO (MZO), Al-doped ZnO (AZO), Ga-dopedZnO (GZO), Al-doped MZO (AMZO), Ga-doped MZO (GMZO) were used as TCOmaterials deposited by RF sputtering. Rutherford Backscatter Spectroscopy(RBS) and X-Ray Diffraction (XRD) were used to analyze the chemicalcomposition and crystal structure of TCO thin films. Light transmittance andsurface resistivity were measured after the different deposited conditions., Mg-, Al-, Ga- doped ZnO indeed modified the optical properties of ZnO andbetter than ITO. However, the electrical conductivity was not improvedobviously compared to ITO when they deposited on PET substrate at roomtemperature.

Keywords

transparent conductorthin filmoptical properties

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