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Polymer Multi-Layer Processing of Thin Film Materials

Published online by Cambridge University Press:  10 February 2011

T. A. Miller ,
M. G. Mikhael ,
R. Ellwanger ,
A. Boufelfel ,
D. Booth  and
A. Yializis
T. A. Miller
Affiliation:
Sigma Technologies International, Inc., 10960 N. Stallard Place, Tucson, AZ 85737
M. G. Mikhael
Affiliation:
Sigma Technologies International, Inc., 10960 N. Stallard Place, Tucson, AZ 85737
R. Ellwanger
Affiliation:
Sigma Technologies International, Inc., 10960 N. Stallard Place, Tucson, AZ 85737
A. Boufelfel
Affiliation:
Sigma Technologies International, Inc., 10960 N. Stallard Place, Tucson, AZ 85737
D. Booth
Affiliation:
Sigma Technologies International, Inc., 10960 N. Stallard Place, Tucson, AZ 85737
A. Yializis
Affiliation:
Sigma Technologies International, Inc., 10960 N. Stallard Place, Tucson, AZ 85737
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Abstract

Polymer Multi-Layer (PML) processing is a high speed industrial scale process for depositing thin polymer films. Moving substrates of arbitrary width can have one micron (typ.) polymer films deposited at speeds measured in hundreds of meters per minute. A wide variety of chemical functionality available in the precursor materials allows a variety of chemical, electrical, and optical applications. The polymer characteristics can be further augmented by subsequent deposition of inorganic materials. Recent advances with dielectric, electrolytic, photonic, barrier, chemical affinity, energetic, and piezoelectric thin film polymer materials are discussed.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 555: Symposium OO – Properties and Processing of Vapor-Deposited Coatings , 1998 , 247
Copyright
Copyright © Materials Research Society 1999

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References

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