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Piezoelectric Properties of Lead Zirconate Titanate Films Prepared by Arc Discharged Reactive Ion-Plating Method

Published online by Cambridge University Press:  26 February 2011

Masahiro Akamatsu ,
Yoshiaki Yasuda ,
Masanao Tani  and
Takashi Iijima
Masahiro Akamatsu
Affiliation:
masahiro_akamatsu@stanley.co.jp, Stanley Electric Co., Ltd., Research & Development Center, 1-3-1 Edanishi, Aoba, Yokohama, Kanagawa, 225-0014, Japan
Yoshiaki Yasuda
Affiliation:
yoshiaki_yasuda@stanley.co.jp, Stanley Electric Co., Ltd., Research & Development Center, Japan
Masanao Tani
Affiliation:
masanao_tani@stanley.co.jp, Stanley Electric Co., Ltd., Research & Development Center, Japan
Takashi Iijima
Affiliation:
iijima-t@aist.go.jp, National Institute of Advanced Industrial Science and Technology, Research Institute of Instrumentation Frontier, Japan
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Abstract

This study is about new plasma deposition method fabricating piezoelectric films applied for actuators in MEMS devices.

Keywords

piezoelectricplasma depositionmicroelectro-mechanical (MEMS)

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 902: Symposium T – Ferroelectric Thin Films XIII , 2005 , 0902-T03-05
Copyright
Copyright © Materials Research Society 2006

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References

References:

1 Akamatsu, M., Tani, M. and Yasuda, Y., Jpn. J. Appl. Phys. 41, 6976 (2002).Google Scholar
2 Yasuda, Y., Akamatsu, M., Tani, M., Yoshida, M., Kondo, K. and Iijima, T., Jpn. J. Appl. Phys. 40, 5518 (2001).Google Scholar
3 Wang, Q. and Cross, L. E., Ferroelectrics 215, 187 (1998).Google Scholar
4 Tani, M., Akamatsu, M., Yasuda, Y., Fujita, H. and Toshinoshi, H., Proc. Optical MEMS 2004, 188 (2004).Google Scholar
5 Jaffe, B., Cook, W. R. and Jaffe, H., “Piezoelectric Ceramics” (Academic Press, London and New York, 1971) pp.146.Google Scholar