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Photoelectron Spectroscopy of Conduction-Electron EnergyDistributions in Laser-Excited Silicon

Published online by Cambridge University Press:  25 February 2011

J.P. Long
Affiliation:
Naval Research Laboratory, Washington, D.C. 20375-5000
R.T. Williams
Affiliation:
Naval Research Laboratory, Washington, D.C. 20375-5000
J.C. Rife
Affiliation:
Naval Research Laboratory, Washington, D.C. 20375-5000
M.N. Kabler
Affiliation:
Naval Research Laboratory, Washington, D.C. 20375-5000
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Abstract

Electron energy distributions, extending from equilibrium surface statesthrough transiently populated conduction band states, have been observed inlaser excited silicon by means of transient photoelectron spectroscopy.Atomically clean (111) wafers in UHV were excited by 90 nsec, 2.33 eV or 65nsec, 4.66 eV pulses. Photoelectron spectra were obtained with the 4.66 eVpulses. Photovoltage shifts have been measured and found to saturate. Wehave identified a feature in the excited state portion of the spectra due toelectrons which have equilibrated in the conduction band minima (CBM).Electron temperatures as a function of 2.33 eV pump fluence have beenextracted from the spectra and are shown to be in equilibrium with thelattice above 1100 K. Very hot non-equilibrium electrons are also observedto ~ 4 eV above the CBM. A method of determining the diffusion depth of CBMelectrons has been developed and applied to our data.

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References

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