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Periodic Structure Formation During Laser Direct-Writing of Palladium Acetate Films: An Optically Regulated Mechanism

Published online by Cambridge University Press:  26 February 2011

L. Baufay  and
M. E. Gross
L. Baufay
Affiliation:
AT&T Bell Laboratories, 600 Mountain Ave., Murray Hill, NJ 07974
M. E. Gross
Affiliation:
AT&T Bell Laboratories, 600 Mountain Ave., Murray Hill, NJ 07974
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Abstract

Laser direct-writing of micron-size metallic features from Pd acetate film precursors is achieved using a scanned cw Ar+ laser. Marked periodic structure is observed in these features under a wide range of exposure conditions. A model based on laser reflectivity and transmittance measurements has been developed to describe the formation of the periodic structure. The model takes into account a complex relationship between optical absorption, laser-induced heating and reaction rate. The decomposition of Pd acetate to metal is endothermic and, therefore, this system differs fundamentally from the “explosive” crystallisation of amorphous semiconductors.

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References

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