Hostname: page-component-54dcc4c588-hp6zs Total loading time: 0 Render date: 2025-10-13T21:47:43.683Z Has data issue: false hasContentIssue false
  • English
  • Français

Novel Differential Surface Stress Sensor for Detection of Chemical and Biological Species

Published online by Cambridge University Press:  01 February 2011

Kyungho Kang  and
Pranav Shrotriya
Kyungho Kang
Affiliation:
kyungho@iastate.edu, Iowa State University, Mechanical Engineering Department, 2025 Black Engineering Building, Ames, IA, 50011, United States
Pranav Shrotriya
Affiliation:
shrotriy@iastate.edu, Iowa State University, Mechanical Engineering Department, 2025 Black Engineering Building, Ames, IA, 50011, United States
Get access

Abstract

A miniature sensor consisting of two adjacent micromachined cantilevers (a sensing/reference pair) is developed for detection of chemical and biological species. A novel interferometric technique is utilized to measure the differential bending of sensing cantilever with respect to reference. Presence of species is detected by measuring the differential surface stress associated with adsorption/absorption of chemical species on sensing cantilever. Surface stress associated with formation of alkanethiol self-assembled monolayers (SAMs) on the sensing cantilever is measured to characterize the sensor performance.

Keywords

sensorself-assemblymicroelectro-mechanical (MEMS)

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1052: Symposium DD – Microelectromechanical Systems–Materials and Devices , 2007 , 1052-DD05-10
Copyright
Copyright © Materials Research Society 2008

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

1 Thundat, T., Warmack, R.J., Chen, G.Y., and Allison, D.P., Thermal and Ambient-Induced Deflections of Scanning Force Microscope Cantilevers. Applied Physics Letters, 1994). 64(21): p. 2894–2896.Google Scholar
2 Fritz, J., Baller, M.K., Lang, H.P., Rothuizen, H., Vettiger, P., Meyer, E., Guntherodt, H.J., Gerber, C., and Gimzewski, J.K., Translating biomolecular recognition into nanomechanics. Science, 2000). 288(5464): p. 316–318.Google Scholar
3 Berger, R., Delamarche, E., Lang, H.P., Gerber, C., Gimzewski, J.K., Meyer, E., and Guntherodt, H.J., Surface stress in the self-assembly of alkanethiols on gold. Science, 1997). 276(5321): p. 2021–2024.Google Scholar
4 Godin, M., Williams, P.J., Tabard-Cossa, V., Laroche, O., Beaulieu, L.Y., Lennox, R.B., and Grutter, P., Surface stress, kinetics, and structure of alkanethiol self-assembled monolayers. Langmuir, 2004). 20(17): p. 7090–7096.Google Scholar
5 Raiteri, R., Butt, H.J., and Grattarola, M., Changes in surface stress at the liquid/solid interface measured with a microcantilever. Electrochimica Acta, 2000). 46(2-3): p. 157–163.Google Scholar
6 Stevenson, K.A., Mehta, A., Sachenko, P., Hansen, K.M., and Thundat, T., Nanomechanical effect of enzymatic manipulation of DNA on microcantilever surfaces. Langmuir, 2002). 18(23): p. 8732–8736.Google Scholar
7 Ulman, A., An Introduction to Ultrathin Organic Films: From Langmuir--Blodgett to Self--Assembly 1991), New York: Academic Press. 442.Google Scholar
8 Stoney, G.G., The tension of metallic films deposited by electrolysis. Proceedings of the Royal Society of London: A, 1909). 82: p. 172–175.Google Scholar
9 Sader, J.E., Chon, J.W.M., and Mulvaney, P., Calibration of rectangular atomic force microscope cantilevers. Review of Scientific Instruments, 1999). 70(10): p. 3967–3969.Google Scholar
10 Sader, J.E. and White, L., Theoretical-Analysis of the Static Deflection of Plates for Atomic-Force Microscope Applications. Journal of Applied Physics, 1993). 74(1): p. 1–9.Google Scholar