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Novel 3-D MEMS Approach to Digitally Printing Organic Semiconductors

Published online by Cambridge University Press:  01 February 2011

Martin W. Schoeppler
Martin W. Schoeppler*
Affiliation:
Spectra, Inc., Santa Clara, California, USA 95050
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Abstract

Ink jet printheads are now widely used in manufacturing processes that require precise dispensing of materials. In response to requirements for dispensing novel electronic fluids, we are developing next generation jetting technology based on our silicon MEMS technology with a three-dimensional silicon technology and a piezo-based pumping chamber integrated into the chip structure. Examples of opportunities and applications in electronics packaging for MEMSbased ink jet technology will be presented.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 870: Symposium H – Giant-Area Electronics on Nonconventional Substrates , 2005 , H4.4
Copyright
Copyright © Materials Research Society 2005

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References

1 James, Mark, “Manufacturing Printed Circuit Boards Using Ink Jet Technology,” IPC 2003.Google Scholar
2 Letendre, Will, Brady, Amy, “Advances in Piezoelectric Micropump Precision Deposition Using Silicon Nozzles,” Imaging Science & Technology Non-Impact Printing 20 Conference, November 2004.Google Scholar
3 Menzel, Chris, Bibl, Andreas, Hoisington, Paul, “MEMS Solutions for Precision Micro-Fluidic Dispensing Applications,” Imaging Science & Technology Non-Impact Printing 20 Conference, November 2004.Google Scholar