Crossref Citations
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Breen, M. R.
Foster, C. M.
Bass, S.
Lee, J. J.
and
Mlynko, W.
2000.
Role of passivation etch polymers in interfacial delamination for polymeric low-k dielectrics.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena,
Vol. 18,
Issue. 3,
p.
1314.