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Meeting RTP Temperature Accuracy Requirements: Measurement and Calibrations at Nist

Published online by Cambridge University Press:  10 February 2011

F. J. Lovas ,
B. K. Tsai  and
C. E. Gibson
F. J. Lovas
Affiliation:
Optical Technology Division, National Institute of Standards and Technology, Gaithersburg MD 20899, lovas@tiber.nist.gov
B. K. Tsai
Affiliation:
Optical Technology Division, National Institute of Standards and Technology, Gaithersburg MD 20899
C. E. Gibson
Affiliation:
Optical Technology Division, National Institute of Standards and Technology, Gaithersburg MD 20899
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Abstract

Although radiometric temperature measurement in rapid thermal processing (RTP) tools has substantially improved in terms of repeatability and uniformity, it still remains a technical challenge. The 1999 requirements of 180 nm line width technology in the 1997 National Technology Roadmap for Semiconductors (NTRS) imply an uncertainty of ± 2 °C in temperature measurement, which will continue the challenge in temperature measurement. In this paper we will discuss the NIST absolute radiometric temperature calibration, measurements, and uncertainty analysis.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 525: Symposium W – Rapid Thermal & Integrated Processing VII , 1998 , 127
Copyright
Copyright © Materials Research Society 1998

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References

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