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Laser-Induced Photodeposition of Fe Films From Iron Carbonyl

Published online by Cambridge University Press:  21 February 2011

P. J. Love ,
R. T. Loda ,
P. R. La Roe ,
A. K. Green  and
Victor Rehn
P. J. Love
Affiliation:
Michelson Laboratory, Research Department Naval Weapons Center, China Lake, California 93555
R. T. Loda
Affiliation:
Michelson Laboratory, Research Department Naval Weapons Center, China Lake, California 93555
P. R. La Roe
Affiliation:
Michelson Laboratory, Research Department Naval Weapons Center, China Lake, California 93555
A. K. Green
Affiliation:
Michelson Laboratory, Research Department Naval Weapons Center, China Lake, California 93555
Victor Rehn
Affiliation:
Michelson Laboratory, Research Department Naval Weapons Center, China Lake, California 93555
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Abstract

Excimer laser photodecomposition of Fe(CO)5 has been used to produce large-area (≳ 1 cm2) Fe films on insulating and semiconducting substrates. Films were deposited in an ultrahigh vacuum system at room temperature or 77 K. Film composition and morphology were examined with Auger-depth profiling, scanning electron microscopy, x-ray fluorescence, and resistivity measurements. At appropriate laser power densities and Fe(CO)5 pressures, adherent metallic films were obtained. These films were typically less than 500 Å thick and contained less than 13% bulk oxygen and carbon contamination.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 29: Symposium I – Laser-Controlled Chemical Processing of Surfaces , 1983 , 101
Copyright
Copyright © Materials Research Society 1984

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References

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