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Ion Beam Processing of Optical Thin Films

Published online by Cambridge University Press:  21 February 2011

U. J. Gibson
U. J. Gibson*
Affiliation:
Optical Sciences Center University of Arizona Tucson, AZ 85721 Current address: F.J.Seiler Research Laboratory USAF Academy CO 80840
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Abstract

The microstructure and optical properties of vacuum evaporated coatings are a sensitive function of the deposition conditions. In recent years, ion bombardment has been used increasingly for the production of denser, more stable coatings of oxides and other materials. In addition to modifying the microstructure, ion bombardment is emerging as a valuable tool for altering the composition (and hence the optical properties) of thin films. A discussion of the effects of ion beam processing and the methods used to analyze the changes in these films is presented.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 152: Symposium H – Optical Materials: Processing and Science , 1989 , 105
Copyright
Copyright © Materials Research Society 1989

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References

REFERENCES

1. Maissel, L. I. and Glang, R., eds Handbook of Thin Film Technology (McGraw-Hill, New York, 1970)Google Scholar
2. Sargent, R. and Macleod, H. A., Proc. SPIE 821(1987)133 Google Scholar
3. Smith, D. Proc. SPIE, 821 (1987)120 CrossRefGoogle Scholar
4. Saxe, S. G., PhD Dissertation, University of Arizona, 1985 Google Scholar
5. Gibson, U. J., White, A. E., and Pronto, P. P., eds Materials Modification and Growth using Ion Beams Materials Research Society Proceedings, Vol 93 (MRS, Pittsburgh, 1987)Google Scholar
6. Gibson, U. J., in Physics of Thin Films, Francombe, M. H. and Vossen, J. L., eds (Academic Press, San Diego, 1987)Google Scholar
7. Martin, P. J., J. Mater. Sci. 21 (1986)1 Google Scholar
8. Smidt, F. A., in NATO Advanced Study Institute, Structure-Property Relations in Ion -Beam Surface Modified Ceramics, ed. McHargue, C. J. (Kluwer Academic Publ., Dordrecht, Netherlands, 1989)(in press)Google Scholar
9. Arndt, D. P., et. al Appl. Opt. 23,(1984)3571–3596 Google Scholar
10. Zernike, F. in Integrated Optics, ed. Tamir, T. (Springer-Verlag, NY 1975) 223 Google Scholar
11. Pelletier, E., Optical Interference Coatings, 1988 Topical Digest Series Vol.6,(Optical Society of America, Washington, DC 1988)Google Scholar
12. Hsu, L. S., She, C. Y. and Exharos, G. J., Appl. Opt. 23, (1984) 3049 Google Scholar
13. Mizrahi, V., Suits, F., Sipe, J.E., Gibson, U. J., and Stegeman, G. I. Appl. Phys Lett. 51,(1987)427 Google Scholar
14. Binh, L.N., Netterfield, R. P., and Martin, P. J., Appl. Surf. Si 22/23 (1985) 656 Google Scholar
15. Gibson, U. J. and Kennemore, C. M. III, Thin Solid Films, 124 (1985) 27 Google Scholar
16. Kennemore, C. M. III and Gibson, U. J., Applied Optics, 23 (1984) 3608 Google Scholar
17. Kennemore, C. M. III and Gibson, U. J., Proc. SPIE, 517 (1984) 150 Google Scholar
18. Cornett, K. D., Taylor, A.P. and Gibson, U. J., Proc. MRS Fall meeting, 1988, in pressGoogle Scholar
19. Cornett, K. D. and Gibson, U. J., Rev. Sci Inst. 59 (1988) 1341 Google Scholar
20. Donovan, E.P., Van Vechten, D., Kahn, A., Carosella, C. A., and Hubler, G. K.. Optical Interference Coatings, 1988 Technical Digest Series, Vol.6, (Optical Society of America Washington, DC 1988) 122 Google Scholar
21. Hwangbo, C. K., Lingg, L. I., Lehan, J. P., Macleod, H. A., and Suits, F., Appl. Opt. (accepted for publication)Google Scholar