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Investigating the Role of Grain Boundaries in Interface Reactions

Published online by Cambridge University Press:  15 February 2011

FranÇois M d'Heurle ,
Patrick Gas  and
Jean Philibert
FranÇois M d'Heurle
Affiliation:
IBM Research Center, PO 218, Yorktown Heights, NY 10598, USA.
Patrick Gas
Affiliation:
CNRS (URA 443), Univ. St Jéröme, Case 511, 13397 Marseille, France.
Jean Philibert
Affiliation:
Laboratoire de Métallurgie, Bt. 413, Univ. Paris-Sud, 91405 Orsay, France.
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Abstract

The paper is built around a nonexhaustive review of the literature on the role of grain boundaries in reactive phase formation. Examples are chosen to illustrate these effects in silicide and oxide growths, and later on in metal-metal interactions. A short section deals with the effect of grain boundaries and grain boundary adsorption of impurities on the kinetics of growth and on the morphology of the growing layer. Some attempts at understanding the mechanisms of phase growth from the tracking of isotopes are briefly analyzed.

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References

REFERENCES

1 van Loo, F. J. J., Prog. Solid St. Chem. 20, 47 (1990).Google Scholar
2 Dybkov, V. I., Phys, J.. Chem. Solids 53, 703 (1992).Google Scholar
3 Philibert, J., Defects and Diffusion Forum 95–98, 493 (1993).CrossRefGoogle Scholar
4 Vredenberg, A., Westendorp, J., Saris, F., van der Pers, N., and de Keijser, T., J. Mater. Res. 1, 774 (1986).Google Scholar
5 Samwer, K., Physics Reports (Review Section of Physics Letters) 1, 161 (1988).Google Scholar
6 Barmak, K., Coffey, K. R., and Rudman, D. A., J. Appl. Phys. 67, 7313 (1990).CrossRefGoogle Scholar
7 Coffey, K. R. and Barmak, K., this symposium.Google Scholar
8 Bradley, A. J. and Taylor, A., Proc. Roy. Soc. A159, 56 (1937).Google Scholar
9 Shankar, S. and Seigle, L. L., Metall. Trans. 9A, 1467 (1978).Google Scholar
10 d’Heurle, F. M. and Ghez, R., Thin Solid Films 215, 19 (1992).Google Scholar
11 van Loo, F. J. J. and Rieck, G. D., Acta Metall. 21, 61 and 73 (1973).Google Scholar
12 Corcoran, Y. L., King, A. H., de Lanerolle, N., and Kim, Bonggi, Electron, J.. Mater. 19, 1177 (1990).Google Scholar
13 Finstad, T. G., Mayer, J. W., and Nicolet, M.-A., Thin Solid Films 51, 391 (1978).CrossRefGoogle Scholar
14 Finstad, T. G., Thin Solid Films 51, 411 (1978).CrossRefGoogle Scholar
15 Li, J., Sacham-Diamand, Y., and Mayer, J. W., Materials Science Reports 9, 1 (1992).CrossRefGoogle Scholar
16 Thompson, R. D., Gupta, D. and Tu, K. N., Phys. Rev. B33, 2636 (1985).Google Scholar
17 Ciccariello, J. C., Poize, S., and Gas, P., J. Appl. Phys. 67, 3315 (1990).Google Scholar
18 Tu, K. N., Chu, W. K., and Mayer, J. W., Thin Solid Films 25, 403 (1975).Google Scholar
19 Zheng, C. R., Zingo, E., Mayer, J. W., Majni, G., and Ottaviani, G., Appl. Phys. Lett. 41, 646 (1982).CrossRefGoogle Scholar
20 Lien, C.-D., Nicolet, M.-A., and Lau, S. S., Phys. Status Solidi a81, 123 (1984).Google Scholar
21 Barge, T., Thesis, Ph. D., Université Saint Jérôme, Marseille, 1993.Google Scholar
22 Gas, P. and d’Heurle, F. M., Appl. Surf. Sci. 73, 153 (1993).Google Scholar
23 Lien, C.-D., Nicolet, M.-A., and Lau, S. S., Appl. Phys. A 34, 249 (1984).Google Scholar
24 Jan, C.-H., Chen, C.-P., and Chen, Y. A., J. Appl. Phys. 73, 1168 (1993).Google Scholar
25 Hong, S. Q., Comrie, C. M., Russell, S. W., and Mayer, J. W., J. Appl. Phys. 70, 3655 (1983).CrossRefGoogle Scholar
26 Becht, J. G. M., van Loo, F. J. J., and Metselaar, R., React. Solids 6, 45 and 61 (1988).Google Scholar
27 Bakker, H., in Diffusion in Crystalline Solids, edited by Murch, G. E. and Novick, A. S. (Academic Press, New York, 1984) p. 189 Google Scholar
28 Kofstad, P., High Temperature Corrosion (Elsevier Applied Science, London, 1988).Google Scholar
29 Smeltzer, W. W., Haering, R. R., and Kirkaldy, J. S., Acta Metall. 9, 880 (1961).Google Scholar
30 Caplan, D., Graham, M. J., and Cohen, M., J. Electrochem. Soc. 119, 1205 (1972).Google Scholar
31 Atkinson, A., Taylor, R. I., and Goode, P. D., Oxid. Met. 13, 519 (1979).Google Scholar
32 Atkinson, A. and Taylor, R. I., Philos. Mag. A43, 979 (1981).Google Scholar
33 Lesage, B. and Déchamps, M., Defect and Diffusion Forum 95–98, 1077 (1993).Google Scholar
34 Sabioni, A. C. S., Lesage, B., Huntz, A. M., Pivin, J. C., and Monty, C., Philos. Mag. A66, 333 (1992).Google Scholar
35 Sabioni, A. C. S., Huntz, A. M., Millot, F., and Monty, C., Philos. Mag. A66, 351 and 361 (1992).Google Scholar
36 The Role of Active Elements in the Oxidation Behaviour of High Temperature Metals and Alloys, edited by Lang, E. (Elsevier Applied Science, London, 1989).CrossRefGoogle Scholar
37 Przybylski, K., Garratt-Reed, A. J., and Yurek, G. J., J. Electrochem. Soc. 135, 509 (1988).Google Scholar
38 Yurek, G. J., Przybylski, K., and Garratt-Reed, A. J., J. Electrochem. Soc. 134, 2643 (1987).Google Scholar
39 Pieraggi, B. and Rapp, R. A., J. Electrochem. Soc. 140, 2844 (1993).Google Scholar
40 Philibert, J. and Huntz, A. M., in Microscopy of Oxidation, edited by Newcomb, S. B. and Benett, M. J. (The Institute of Materials, London, 1993) p. 253.Google Scholar
41 Mishin, Yu. M. and Borchardt, G., J. Phys. Ill (France) 3, 863 and 945 (1993).Google Scholar
42 Zhang, S.-L., d’Heurle, F. M., and Gas, P., Appl. Surf. Sci. 53, 103 (1991).Google Scholar
43 Peterson, N. L., Intl. Metals Rev. 28, 65 (1983).Google Scholar
44 Stark, J. P., Acta Metall. 31, 2083 (1983).Google Scholar
45 Aly, E.-S. M. and Stark, J. P., Acta Metall. 32, 907 (1984).Google Scholar
46 Gas, P., Zaring, K., Svensson, B. G., Östling, M., Petersson, C. S., and d’Heurle, F. M., J. Appl. Phys. 67, 2390 (1990).Google Scholar
47 Schmalzried, H., Solid State Reactions (Verlag Chemie, Weinheim, 1981) p. 14.Google Scholar
48 Neijmeijer, W. L. and Kolster, B. H., Z. Metallkde 81, 314 (1990).Google Scholar
49 Janssen, M. M., Met. Trans. 4, 1623 (1973).Google Scholar
50 Baglin, J. E. E., d’Heurle, F. M., and Hammer, W. N., J. Appl. Phys. 50, 266 (1979).Google Scholar
51 Campisano, S. U., Foti, G., Rimini, E., Lau, S. S., and Mayer, J. W., Philos. Mag. 31, 903 (1975).Google Scholar
52 Baglin, J. E. and Poate, J. M., in Thin Films: Interdiffusion and Reactions, edited by Poate, J. M., Tu, K. N., and Mayer, J. W. (John Wiley, New York, 1978) p. 305.Google Scholar
53 Lever, R. F., Howard, J. K., Chu, W. K., and Smith, P. J., Vac, J.. Sci. Technol. 1, 158 (1977).Google Scholar
54 Maugis, P., Blaise, G., and Philibert, J., Mater. Res. Soc. Symp. Proc. 237, 679 (1992).Google Scholar
55 Petersson, C. S., Baglin, J. E., d’Heurle, F. M., Dempsey, J., Harper, J., Serrano, C., and Tsai, M. Y., in Thin Film Interfaces and Interactions, edited by Baglin, J. E. and Poate, J. (The Electrochemical Society, Pennington N. J., 1980) p. 290.Google Scholar
56 Baglin, J. E., Dempsey, J., Hammer, W., d’Heurle, F. M., Petersson, C. S., and Serrano, C., J. Electron. Mater. 8, 641 (1979).Google Scholar
57 Thomas, O., Dclage, S., and d’Heurle, F. M., J. Mater. Res. 5, 1453 (1990).Google Scholar
58 Wittmer, M., LeGoues, F., and Huang, H.-C. W., J. Electrochem. Soc. 132, 1450 (1985).Google Scholar
59 Wittmer, M., Huang, H.-C., and LeGoues, F., Philos. Mag. A 53, 687 (1986).Google Scholar
60 d’Heurle, F. M. and Gangulee, M., in Nature and Behavior of Grain Boundaries, edited by Hu, Hsun (Plenum Press, New York, 1973) p. 339.Google Scholar
61 Zhao, X.-A., So, F. C. T., and Nicolet, M.-A., J. Appl. Phys. 63, 2800 (1988).Google Scholar
62 Gupta, D., in Diffusion Phenomena in Thin Films and Microelectronic Materials, edited by Gupta, D. and Ho, P. S. (Noyes Publications, Park Ridge, NJ, 1988) p. 1.Google Scholar
63 Vredenberg, A., Westendorp, J., Saris, F., van der Pers, N., and de Keijser, T., J. Mater. Res. 1, 774 (1986).Google Scholar
64 Pampus, K., Samwer, K., and Böttiger, J., Europhys. Lett. 3, 581 (1987).Google Scholar
65 Gusak, A. M. and Gurov, K. P., Solid State Phenomena 23 & 24, 117 (1992).Google Scholar