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Integration of microcatalysts on thin membrane for thermoelectric gas sensor devices

Published online by Cambridge University Press:  01 February 2011

Yeongsoo Choi ,
Woosuck Shin ,
Kazuki Tajima ,
Noriya Izu ,
Ichiro Matsubara  and
Norimitsu Murayama
Yeongsoo Choi
Affiliation:
National Institute of Advanced Industrial Science and Technology, Nagoya 463–8560, Japan
Woosuck Shin
Affiliation:
National Institute of Advanced Industrial Science and Technology, Nagoya 463–8560, Japan
Kazuki Tajima
Affiliation:
National Institute of Advanced Industrial Science and Technology, Nagoya 463–8560, Japan
Noriya Izu
Affiliation:
National Institute of Advanced Industrial Science and Technology, Nagoya 463–8560, Japan
Ichiro Matsubara
Affiliation:
National Institute of Advanced Industrial Science and Technology, Nagoya 463–8560, Japan
Norimitsu Murayama
Affiliation:
National Institute of Advanced Industrial Science and Technology, Nagoya 463–8560, Japan
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Abstract

Dispenser technique was employed to integrate the Pt loaded on alumina (Pt/alumina) micro-catalysts on thin membrane of micro-thermoelectric hydrogen sensor (μ-THS). The μ-THS with Pt loaded alumina showed higher sensing performance than bulk-type THS with Pt thin film prepared by RF sputtering method. For the μ-THS with Pt/alumina catalyst, its voltage signal was 7.3 mV for hydrogen concentration of 1 % in dry air at catalyst temperature of 100 °C. In the case of the bulk-type THS with Pt thin film catalysts, the voltage signal was 0.33 mV under the same condition.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 828: Symposium A – Semiconductor Materials for Sensing , 2004 , A7.3
Copyright
Copyright © Materials Research Society 2005

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References

REFERENCES

1. Shin, W., Imai, K., Izu, N., Murayama, N., Jpn. J. Appl. Phys. 40 (2001) L1232.Google Scholar
2. Matsumiya, M., Shin, W., izu, N., Murayama, N., Sens. Actuators B 93 (2003) 309.Google Scholar
3. Shin, W., Matsumiya, M., izu, N., Murayama, N., Sens. Actuators B 93 (2003) 304.Google Scholar
4. Tajima, K., Qiu, F., Shin, W., Sawaguchi, N., Izu, N., Matsubara, I., Murayama, N., Jpn. J. Appl. Phys., 43 (2004) 5978.Google Scholar
5. Tajima, K., Choi, Y., Shin, W., Izu, N., Matsubara, I., Murayama, N., Proceedings of the 24th Electronics Division Meeting, Oct 21–22, 2004, Tokyo, Japan.Google Scholar
6. Shin, W., Tajima, K., Choi, Y., Izu, N., Matsubara, I., Murayama, N., unpublished, Proceedings of the 10th International Meeting on Chemical Sensors, July 11–14, 2004, Tsukuba, Japan.Google Scholar
7. Williamson, G‥ K., Hall, W. H.. Acta Metall. 1 (1953) 22.Google Scholar