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Infrared Spectroscopy of Covalently Bonded Species on Silicon Surfaces: Deuterium, Chlorine, and Cobalt Tetracarbonyl

Published online by Cambridge University Press:  10 February 2011

Huihong Luo ,
Christopher E. D. Chidsey  and
Yves Chabal
Huihong Luo
Affiliation:
Department of Chemistry, Stanford University, Stanford, CA 94305-5080
Christopher E. D. Chidsey
Affiliation:
Department of Chemistry, Stanford University, Stanford, CA 94305-5080
Yves Chabal
Affiliation:
Bell Laboratories, Lucent Technologies, Murray Hill, NJ 07974
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Abstract

We report the formation of deuterium-terminated Si(111) and Si(100) surfaces in deuterated aqueous KF. The reaction of a deuterated Si(100) surface with H2O is investigated. We find that H2O etches the surface to give hydrogen termination and oxidized silicon hydrides. Hydrogenterminated surfaces react with various reagents under non-UHV conditions to form other covalent bonded species, including Cl-Si and Co(CO)4-Si. These species are characterized by polarized ATR and transmission FTIR. On Cl-Si(111) surfaces, Cl-Si is perpendicular to the surface. Chlorine-terminated Si(100) reacts with H2O to produce the hydrogen terminated surface. On Co(CO)4-Si(111) surfaces, one carbonyl is perpendicular to the surface, and the other three are approximately parallel to the surface.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 477 , 1997 , 415
Copyright
Copyright © Materials Research Society 1997

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References

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