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Excimer Laser Induced Mechanical and Electrical Nanostructures in Polymers

Published online by Cambridge University Press:  01 January 1992

H. M. Phillips ,
D. L. Callahan ,
S. P. Le blanc ,
Z. Ball  and
R. Sauerbrey
H. M. Phillips
Affiliation:
Department of Electrical and Computer Engineering
D. L. Callahan*
Affiliation:
Department of Electrical and Computer Engineering
S. P. Le blanc
Affiliation:
Department of Electrical and Computer Engineering
Z. Ball
Affiliation:
Department of Electrical and Computer Engineering
R. Sauerbrey
Affiliation:
Department of Electrical and Computer Engineering
*
* Department of Mechanical Engineering and Materials Science Rice University, P. O. Box 1892, Houston, TX 77251–1892
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Abstract

Periodic line structures with periods ranging from 166 nm to 950 nm have been produced in polyimide by direct ablation with a KrF (248 nm) laser using holographic techniques. Taking advantage of the large nonlinearity in the laser ablation process, linewidths ranging from 30 nm to several hundred nanometers could be obtained. These techniques were combined with the ability to induce electrical conductivity in polyimide to produce an array of 500 nm wide electrically conducting wires. The conductivity of these wires was similar to that found in macroscopic regions of laser induced conductivity.

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References

REFERENCES

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