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Epitaxial Growth of Ferroelectric Pb(Zr,Ti)O3 Layers on GaAs

Published online by Cambridge University Press:  19 August 2014

Benjamin Meunier ,
Lamis Louahadj ,
David Le Bourdais ,
Ludovic Largeau ,
Guillaume Agnus ,
Philippe Lecoeur ,
Valérie Pillard ,
Lucie Mazet ,
Romain Bachelet  and
Philippe Regreny
...Show all authors
Benjamin Meunier
Affiliation:
Ecole Centrale de Lyon, INL-CNRS, Ecully, France
Lamis Louahadj
Affiliation:
RIBER SA, Bezons, France
David Le Bourdais
Affiliation:
Université Paris-Sud, Institut d’Electronique Fondamentale, Orsay, France
Ludovic Largeau
Affiliation:
LPN-CNRS, Marcoussis, France
Guillaume Agnus
Affiliation:
Université Paris-Sud, Institut d’Electronique Fondamentale, Orsay, France
Philippe Lecoeur
Affiliation:
Université Paris-Sud, Institut d’Electronique Fondamentale, Orsay, France
Valérie Pillard
Affiliation:
Université Paris-Sud, Institut d’Electronique Fondamentale, Orsay, France
Lucie Mazet
Affiliation:
Ecole Centrale de Lyon, INL-CNRS, Ecully, France
Romain Bachelet
Affiliation:
Ecole Centrale de Lyon, INL-CNRS, Ecully, France
Philippe Regreny
Affiliation:
Ecole Centrale de Lyon, INL-CNRS, Ecully, France
Claude Botella
Affiliation:
Ecole Centrale de Lyon, INL-CNRS, Ecully, France
Geneviève Grenet
Affiliation:
Ecole Centrale de Lyon, INL-CNRS, Ecully, France
David Albertini
Affiliation:
INSA, INL-CNRS, Villeurbanne, France
Catherine Dubourdieu
Affiliation:
Ecole Centrale de Lyon, INL-CNRS, Ecully, France
Brice Gautier
Affiliation:
INSA, INL-CNRS, Villeurbanne, France
Guillaume Saint-Girons
Affiliation:
Ecole Centrale de Lyon, INL-CNRS, Ecully, France
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Abstract

Ferroelectric epitaxial Pb(Zr,Ti)O3 (PZT) layers were grown by pulsed laser deposition on SrTiO3/GaAs templates fabricated by molecular beam epitaxy. The templates present an excellent structural quality and the SrTiO3/GaAs is abrupt at the atomic scale thanks to surface Ti pre-treatment. The PZT layers contain a- and c- domains, as shown by X-Ray diffraction analyses. Piezoforce microscopy experiments and macroscopic electrical characterizations indicate that PZT is ferroelectric. A relative dielectric permittivity of 164 is extracted from these measurements.

Keywords

epitaxyferroelectricoxide

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References

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