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Electrical Properties of Ultra Thin Tin Oxide Films

Published online by Cambridge University Press:  10 February 2011

Yuji Matsui  and
Yoshio Goto
Yuji Matsui
Affiliation:
New Products Dev. Ctr, Fabricated Glass General Div., Asahi Glass Co., Ltd. 1-1 Suehiro-cho, Tsurumi-ku, Yokohama, Kanagawa, 230 Japan, yuuji-matsui@om.agc.co.jp
Yoshio Goto
Affiliation:
New Products Dev. Ctr, Fabricated Glass General Div., Asahi Glass Co., Ltd. 1-1 Suehiro-cho, Tsurumi-ku, Yokohama, Kanagawa, 230 Japan
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Abstract

Tin Oxide transparent conductive oxide(TCO) films of less than 20nm in thickness was developed as a substrate for pen touch screens. The films were deposited using APCVD method by hydrolytic decomposition of stannic chloride. Electrical properties and stability to heat treatment were studied in relation to deposition conditions. We found the both properties depends mainly on fluorine concentration in the films. The stability was much improved at reduced fluorine concentration. The film which showed the stability to heat treatment at 600°C heat treatment was attained at the thickness of 20nm.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 558: Symposium B – Flat-Panel Displays and Sensors-Principles, Materials… , 1999 , 393
Copyright
Copyright © Materials Research Society 2000

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References

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