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Electrical and Optical Properties of Thermid Polyimide

Published online by Cambridge University Press:  25 February 2011

Patrick G. Jobe ,
Christine Puglisi ,
Z. X. Zhu ,
K. J. Fang ,
D. Liu ,
N. Patel ,
E. Niver ,
H. Grebel ,
G. M. Qin  and
K. D. Moller
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Patrick G. Jobe
Affiliation:
Thermal Materials, National Starch and Chemical Company
Christine Puglisi
Affiliation:
Thermal Materials, National Starch and Chemical Company
Z. X. Zhu
Affiliation:
Electrical Engineering Department, New Jersey Institute of Technology
K. J. Fang
Affiliation:
Electrical Engineering Department, New Jersey Institute of Technology
D. Liu
Affiliation:
Electrical Engineering Department, New Jersey Institute of Technology
N. Patel
Affiliation:
Electrical Engineering Department, New Jersey Institute of Technology
E. Niver
Affiliation:
Electrical Engineering Department, New Jersey Institute of Technology
H. Grebel
Affiliation:
Electrical Engineering Department, New Jersey Institute of Technology
G. M. Qin
Affiliation:
Physics Department, New Jersey Institute of Technology
K. D. Moller
Affiliation:
Physics Department, New Jersey Institute of Technology
S. N. Zhao
Affiliation:
Physics Department, New Jersey Institute of Technology
G. Feng
Affiliation:
Physics Department, New Jersey Institute of Technology
N. M. Ravindra
Affiliation:
Physics Department, New Jersey Institute of Technology
K. K. Chin
Affiliation:
Physics Department, New Jersey Institute of Technology
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Abstract

THERMID, made of acetylene-terminated polyimide oligomers, was developed by National Starch & Chemical Co. It is capable of forming thicker deposits than conventional polyimides. It is a candidate for a broad array of electronic and optoelectronic applications, including passivation coating, alpha-particle barrier, interlayer dielectric, encapsulation of discrete devices and IC, optical waveguide, and multilayer dielectric for thin hybrids. The study and evaluation of electrical and optical properties of THERMID polyimide give more support to their application in the semiconductor industry.

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References

REFERENCE

[1] Kern, W., Semiconductor International, August, 1987, 81.Google Scholar
[2] THERMID EL-5000 Series Pofyimides, National Starch & Chemical Co., P. O. Box 6500, Bridgewater, NJ 08807Google Scholar
[3] Keithley 236 Source Measure Unit Application Manual, Keithley Instruments, Inc. Cleveland, Ohio, 1984, pp2–8.Google Scholar
[4] bell, R., Introductory Fourier Transform Spectroscopy, (Academic Press, 1972), pp237–250.Google Scholar