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Effects of Thickness and Indenter Geometry in Nanoindentation of Nickel Thin Films

Published online by Cambridge University Press:  01 February 2011

Padma Parakala ,
Reza A. Mirshams ,
Seifollah Nasrazadani  and
Kun Lian
Padma Parakala
Affiliation:
Department of Engineering Technology, University of North Texas, Denton, TX 76203
Reza A. Mirshams
Affiliation:
Department of Engineering Technology, University of North Texas, Denton, TX 76203
Seifollah Nasrazadani
Affiliation:
Department of Engineering Technology, University of North Texas, Denton, TX 76203
Kun Lian
Affiliation:
Department of Engineering Technology, University of North Texas, Denton, TX 76203
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Abstract

Effects of thickness and tip geometry on Ni thin films deposited on Cu substrate were studied using nanoindenter. The deformation mechanisms in correlation to hardness measurements were discussed at various loads and depths of penetration. The Berkovich, Cube corner and Conical tips have been used in this study. Initially, the hardness and modulus of elasticity were measured at a depth of 10% of film thickness. The depth of penetration was increased to 20% to observe the depth effects. Analysis of data showed that there is an Indentation Size Effect (ISE) irrespective of indenter tip geometries.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 795: Symposium U – Thin Films - Stresses and Mechanical Properties X , 2003 , U11.19
Copyright
Copyright © Materials Research Society 2004

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