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Published online by Cambridge University Press: 17 March 2011
180 keV Mn+ ions were implanted in silica glass at doses rangingfrom 1×1016 to 2×1017 ions/cm2 at roomtemperature. The coordination structure of implanted Mn atoms was studied byX-ray absorption spectroscopy. It was found that Mn atoms were mainlycoordinated by O atoms in silica glasses as-implanted at doses lower than 5×1016Mn+ions/cm2. The Mn-O bonddistance was 2.07 Å and the coordination number was 4.3 in average. Mn atomswere mainly coordinated by Mn and O atoms in the glasses as-implanted atdoses higher than 1×1017 Mn+ions/cm2. Inall the glasses, Mn atoms which are coordinated by O atoms were present asdivalent state. After heating at 700 °C in air, Mn atoms were present astrivalent state and tended to form oxide crystals.