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Advanced Bulge Test System

Published online by Cambridge University Press:  10 February 2011

H. Keiner ,
F. J. von Preissig ,
H. Zeng ,
M. N. G. Nejhad  and
E. S. Kim
H. Keiner
Affiliation:
Dept. of Mechanical Engineering, University of Hawaii at Manoa, Honolulu, HI 96822
F. J. von Preissig
Affiliation:
Dept. of Electrical Engineering, University of Hawaii at Manoa, Honolulu, HI 96822
H. Zeng
Affiliation:
Dept. of Electrical Engineering, University of Hawaii at Manoa, Honolulu, HI 96822
M. N. G. Nejhad
Affiliation:
Dept. of Mechanical Engineering, University of Hawaii at Manoa, Honolulu, HI 96822
E. S. Kim
Affiliation:
Dept. of Electrical Engineering, University of Hawaii at Manoa, Honolulu, HI 96822
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Abstract

The bulge test is an established method of measuring the residual stress and elastic stiffness of thin-film materials. We present an advanced experimental bulge-testing system that provides advantages in speed, accuracy, and flexibility. Key innovations include the use of a Laser Doppler Displacement Meter to measure deflection, an actuated air-cylinder mechanism to vary pressure, and sophisticated computer handling of data acquisition and analysis. A test case demonstrates that repeatability of results is extremely good.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 505 , 1997 , 229
Copyright
Copyright © Materials Research Society 1998

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References

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