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Towards High Energy Density 3D-integrated Lithium-ion Micro-batteries

Published online by Cambridge University Press:  31 January 2011

Jos F.M. Oudenhoven ,
Loïc Baggetto ,
Rogier A.H. Niessen ,
Harm C.H Knoops ,
Merijn Donders ,
Teus van Dongen ,
Mart de Croon ,
Erwin Kessels  and
Peter Notten
Jos F.M. Oudenhoven
Affiliation:
j.f.m.oudenhoven@tue.nl, Eindhoven University of Technology, Eindhoven, Netherlands
Loïc Baggetto
Affiliation:
l.baggetto@tue.nl, Eindhoven University of Technology, Eindhoven, Netherlands
Rogier A.H. Niessen
Affiliation:
rogier.niessen@philips.com, Philips Research Laboratories, Eindhoven, Netherlands
Harm C.H Knoops
Affiliation:
h.c.m.knoops@tue.nl, Eindhoven University of Technology, Eindhoven, Netherlands
Merijn Donders
Affiliation:
m.e.donders@tue.nl, Eindhoven University of Technology, Eindhoven, Netherlands
Teus van Dongen
Affiliation:
teus.van.dongen@philips.com, Philips Research Laboratories, Eindhoven, Netherlands
Mart de Croon
Affiliation:
m.h.j.m.de.croon@tue.nl, Eindhoven University of Technology, Eindhoven, Netherlands
Erwin Kessels
Affiliation:
W.M.M.Kessels@tue.nl, United States
Peter Notten
Affiliation:
peter.notten@philips.com, Eindhoven University of Technology, Eindhoven, Netherlands
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Abstract

To investigate the feasibility of a 3D integrated all-solid-state micro-battery, the deposition of several battery materials was investigated. Deposition techniques where used that are in principle able to deposit step conformally in 3D structures: ALD was used to create a conductive Pt current collector, and LPCVD was applied for the deposition of poly-silicon anodes and LiCoO2 cathodes.The layers, initially deposited on planar substrates, showed the expected physical and electrochemical behavior and are in principle suitable for solid state micro-batteries.

Keywords

energy storagechemical vapor deposition (CVD) (deposition)atomic layer deposition

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References

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