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Preparation of PbTiO3-Pb(Mg0.5W0.5)O3 Thin Films Using Pulsed Laser Deposition

Published online by Cambridge University Press:  01 January 1992

B. W. Lee ,
H. M. Lee ,
L. P. Cook ,
P. K. Schenck ,
A. Paul ,
W. Wong-ng ,
C. K. Chiang ,
P. S. Brody ,
B. J. Rod  and
K. W. Bennett
B. W. Lee
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD. Guest Scientist from Hanyang University, Seoul, Korea.
H. M. Lee
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD. University of Maryland, College Park, MD.
L. P. Cook
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD.
P. K. Schenck
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD.
A. Paul
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD.
W. Wong-ng
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD.
C. K. Chiang
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD.
P. S. Brody
Affiliation:
U.S. Army Research Laboratory, Adelphi, MD.
B. J. Rod
Affiliation:
U.S. Army Research Laboratory, Adelphi, MD.
K. W. Bennett
Affiliation:
U.S. Army Research Laboratory, Adelphi, MD.
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Abstract

Thepreparation of modified lead titanate (0.PbTiO3-Pb(Mg0.5W0.5)O3) thin films by pulsed excimer laser deposition on Pt-coated Si substrates has been studied. Films were prepared with substrate temperatures of 300–650°C, and ambient oxygen pressures of 2.7–4OPa. Phase formation and morphology of the films varied according to deposition conditions. At 650°C, 40Pa, well-crystallized perovskite single phase films were obtained. Most films were ferroelectric and showed preferred orientation which could be correlated with the texture of the underlying platinum. The effect of preferred orientation on the dielectric properties of the films is discussed.

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References

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