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Microwave Dielectric Spectroscopy of Ferroelectric Thin Films

Published online by Cambridge University Press:  01 February 2011

Beomjin Kim ,
Victor Kazmirenko ,
Minki Jeong ,
Yuri Poplavko  and
Sunggi Baik
Beomjin Kim
Affiliation:
Department of Materials Science and Engineering, Pohang University of Science and Technology, Pohang, 790-784, Korea
Minki Jeong
Affiliation:
Department of Materials Science and Engineering, Pohang University of Science and Technology, Pohang, 790-784, Korea
Sunggi Baik
Affiliation:
Department of Materials Science and Engineering, Pohang University of Science and Technology, Pohang, 790-784, Korea
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Abstract

We devised a measurement method of microwave dielectric constants of dielectric thin films without applying electrodes. The method uses a rectangular waveguide in which the dielectric thin films prepared on a substrate are filled vertically at the center. The frequency dependence of S-parameter measured by network analyzer enables us to calculate the dielectric constant and loss factor of the films at the microwave region through simulation. We prepared Ba0.6Sr0.4TiO3 thin films on (001) MgO single crystal substrate by pulsed laser deposition (PLD), and determined their dielectric constant and loss factor at ∼10GHz using this method.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 720: Symposium H – Materials Issues for Tunable RF and Microwave Devices III , 2002 , H3.2
Copyright
Copyright © Materials Research Society 2002

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References

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