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Hydrogen Diffusion in Boron Doped Diamond: Evidence of Hydrogen-Boron Interactions

Published online by Cambridge University Press:  10 February 2011

J. Chevallier ,
B. Theys ,
C. Grattepain ,
A. Deneuville  and
E. Gheeraert
J. Chevallier
Affiliation:
Laboratoire de Physique des Solides de Bellevue, CNRS, 1 place A.Briand, 92195 Meudon Cedex, France
B. Theys
Affiliation:
Laboratoire de Physique des Solides de Bellevue, CNRS, 1 place A.Briand, 92195 Meudon Cedex, France
C. Grattepain
Affiliation:
Laboratoire de Physique des Solides de Bellevue, CNRS, 1 place A.Briand, 92195 Meudon Cedex, France
A. Deneuville
Affiliation:
Laboratoire d'Etudes des Propriétés Electroniques des Solides, CNRS, BP 166, 38042 Grenoble, France
E. Gheeraert
Affiliation:
Laboratoire d'Etudes des Propriétés Electroniques des Solides, CNRS, BP 166, 38042 Grenoble, France
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Abstract

Deuterium diffusion has been investigated in boron doped diamond as a function of the diffusion temperature and the boron concentration. The results show that, up to 480°C, hydrogen diffusion is limited by the boron concentration with a diffusion activation energy of 0.35 eV for [B] = 5×1019 cm−3. This first experimental evidence of deuterium-boron interactions in diamond is interpreted as the result of hydrogen ionization and diffusion of fairly mobile protons which form pairs with negatively charged boron acceptors

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 510: Symposium D – Defect & Impurity Engineered Semiconductors & Devices II , January 1998 , 169
Copyright
Copyright © Materials Research Society 1998

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