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Dynamic Modelling of CVD for Real-Time Control of Microstructure

Published online by Cambridge University Press:  15 February 2011

M.A. Gevelber ,
M.T. Quiñones  and
M.L. Bufano
M.A. Gevelber
Affiliation:
Manufacturing Engineering, Boston University, 44 Curnmington St., Boston MA 02215
M.T. Quiñones
Affiliation:
Manufacturing Engineering, Boston University, 44 Curnmington St., Boston MA 02215
M.L. Bufano
Affiliation:
Manufacturing Engineering, Boston University, 44 Curnmington St., Boston MA 02215
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Abstract

A nonlinear dynamic model of the chemical vapor deposition (CVD) process has been developed and analyzed to obtain insight into the design of an appropriate control structure.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 363 , 1994 , 33
Copyright
Copyright © Materials Research Society 1995

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References

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