Tungsten Electrodes Reduce Parasitic Source/Drain Resistance of Poly-Si TFT

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Type: Research/Researchers
Information: MRS Bulletin , Volume 29 , Issue 3: High-Resolution Three-Dimensional X-Ray Microscopy , March 2004 , pp. 138 - 140

DOI: https://doi.org/10.1557/mrs2004.45 [Opens in a new window]

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Tungsten Electrodes Reduce Parasitic Source/Drain Resistance of Poly-Si TFT

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