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Tribology of MEMS

Published online by Cambridge University Press:  31 January 2011

M.P. de Boer  and
T.M. Mayer
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Because of large surface-to-volume ratios and low restoring forces, unwanted adhesion and friction can dominate the performance of microelectromechanical systems (MEMS) devices. To guarantee the function and reliability of MEMS devices, tribologists must understand the origins of adhesion, friction, and wear over a broad range of length scales from the macroscopic to the molecular. In this article, we present an overview of challenges, successes, and initial steps toward a fundamental understanding.

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Research Article
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MRS Bulletin , Volume 26 , Issue 4: Microelectromechanical Systems (MEMS): Technology and Applications , April 2001 , pp. 302 - 304
Copyright
Copyright © Materials Research Society 2001

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