Sputtered Co/Ti Film Directly Oxidized Forms High-κ CoTiO3

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Type: Research/Researchers
Information: MRS Bulletin , Volume 25 , Issue 9: Soft Processing for Advanced Inorganic Materials , September 2000 , pp. 6

DOI: https://doi.org/10.1557/mrs2000.163 [Opens in a new window]

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Sputtered Co/Ti Film Directly Oxidized Forms High-κ CoTiO3

Volume 25, Issue 9
Wirawan Purwanto
DOI: https://doi.org/10.1557/mrs2000.163

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Sputtered Co/Ti Film Directly Oxidized Forms High-κ CoTiO3

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