Plasma Processing for VLSI Edited by: N. G. Einspruch and D. M. Brown (Volume 8 of VLSI Electronics Microstructure Science, edited by N. G. Einspruch, 1984, Academic Press)

Stephen M. Bobbio

doi:10.1557/S0883769400069657

Plasma Processing for VLSI Edited by: N. G. Einspruch and D. M. Brown (Volume 8 of VLSI Electronics Microstructure Science, edited by N. G. Einspruch, 1984, Academic Press)

Review products

Plasma Processing for VLSI Edited by: N. G. Einspruch and D. M. Brown (Volume 8 of VLSI Electronics Microstructure Science, edited by N. G. Einspruch, 1984, Academic Press)

Published online by Cambridge University Press: 29 November 2013

Stephen M. Bobbio

Article contents

Abstract

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'

Information

Type: Departments
Information: MRS Bulletin , Volume 11 , Issue 1 , February 1986 , pp. 2

DOI: https://doi.org/10.1557/S0883769400069657 [Opens in a new window]

Article contents

Plasma Processing for VLSI Edited by: N. G. Einspruch and D. M. Brown (Volume 8 of VLSI Electronics Microstructure Science, edited by N. G. Einspruch, 1984, Academic Press)

Review products

Abstract

Information

Save article to Kindle

Save article to Dropbox

Save article to Google Drive

Reply to: Submit a response

Your details

You have entered the maximum number of contributors

Conflicting interests