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Fundamentals of Sputtered Neutral Mass Spectrometry

Published online by Cambridge University Press:  29 November 2013

U. Kaiser  and
J.C. Huneke
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Abstract

Sputtered neutral mass spectrometry (SNMS) is a technique for elemental and isotopic analysis with excellent detection limits, with similar sensitivity for all elements and without substantial matrix effects. Particles sputter atomized from the sample surface are ionized and mass spectrometrically measured. Elemental detection limits are routinely 1–10 ppm, but can be as low as 1–10 ppb. Particular modes of SNMS enable the measurement of accurate concentration depth profiles with resolutions approaching 20 Å and the measurement of electrically insulating samples.

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Type
Materials Microanalysis
Information
MRS Bulletin , Volume 12 , Issue 6 , September 1987 , pp. 48 - 51
Copyright
Copyright © Materials Research Society 1987

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