Crossref Citations
This article has been cited by the following publications. This list is generated based on data provided by Crossref.
Chen, Francis F
1990.
Excitation of large amplitude plasma waves.
Physica Scripta,
Vol. T30,
Issue. ,
p.
14.
Komori, A.
Shoji, T.
Miyamoto, K.
Kawai, J.
and
Kawai, Y.
1991.
Helicon waves and efficient plasma production.
Physics of Fluids B: Plasma Physics,
Vol. 3,
Issue. 4,
p.
893.
Zhu, Peiyuan
and
Boswell, R. W.
1991.
Observation of nonthermal electron tails in an rf excited argon magnetoplasma.
Physics of Fluids B: Plasma Physics,
Vol. 3,
Issue. 4,
p.
869.
Loewenhardt, P.
Blackwell, B.
Boswell, R.
Conway, G.
and
Hamberger, S.
1991.
Plasma production in a toroidal heliac by helicon waves.
Physical Review Letters,
Vol. 67,
Issue. 20,
p.
2792.
Chen, F F
1991.
Plasma ionization by helicon waves.
Plasma Physics and Controlled Fusion,
Vol. 33,
Issue. 4,
p.
339.
Chen, F F
and
Decker, C D
1992.
Electron acceleration in helicon sources.
Plasma Physics and Controlled Fusion,
Vol. 34,
Issue. 4,
p.
635.
Kitagawa, H
Tsunoda, A
Shindo, H
and
Horiike, Y
1993.
Etching characteristics in helicon wave plasma.
Plasma Sources Science and Technology,
Vol. 2,
Issue. 1,
p.
11.
Giapis, Konstantinos P.
Sadeghi, Nader
Margot, Joëlle
Gottscho, Richard A.
and
Lee, T. C. John
1993.
Limits to ion energy control in high density glow discharges: Measurement of absolute metastable ion concentrations.
Journal of Applied Physics,
Vol. 73,
Issue. 11,
p.
7188.
Loewenhardt, P. K.
Blackwell, B. D.
and
Hamberger, S. M.
1994.
Production of fast electrons in a prototype heliac by helicon waves.
Physics of Plasmas,
Vol. 1,
Issue. 4,
p.
875.
Shamrai, K P
and
Taranov, V B
1994.
Resonance wave discharge and collisional energy absorption in helicon plasma source.
Plasma Physics and Controlled Fusion,
Vol. 36,
Issue. 11,
p.
1719.
Kirichenko, G.S.
Taranov, V.B.
Shamrai, K.P.
and
Yagola, V.V.
1994.
rf discharge in the fields of plasma resonator eigenmodes.
Physics Letters A,
Vol. 191,
Issue. 1-2,
p.
167.
Shoucri, M.
1994.
Helicon waves in a cylindrical plasma column.
Journal of Plasma Physics,
Vol. 52,
Issue. 3,
p.
465.
LIEBERMAN, MICHAEL A.
and
GOTTSCHO, RICHARD A.
1994.
Plasma Sources for Thin Film Deposition and Etching.
Vol. 18,
Issue. ,
p.
1.
Chen, Francis F.
1995.
High Density Plasma Sources.
p.
1.
Takeno, H
Yasaka, Y
Sakai, O
and
Itatani, R
1995.
High density central cell plasma production and ion heating by helicon wave damping and its mode conversion into a slow Alfven wave.
Nuclear Fusion,
Vol. 35,
Issue. 1,
p.
75.
Stewart, R A
Vitello, P
Graves, D B
Jaeger, E F
and
Berry, L A
1995.
Plasma uniformity in high-density inductively coupled plasma tools.
Plasma Sources Science and Technology,
Vol. 4,
Issue. 1,
p.
36.
Loewenhardt, P K
Blackwell, B D
and
Hamberger, S M
1995.
Helicon wave propagation in the SHEILA heliac.
Plasma Physics and Controlled Fusion,
Vol. 37,
Issue. 3,
p.
229.
Kim, Jung-Hyung
Yun, Seok-Min
and
Chang, Hong-Young
1996.
M = +1 mode helicon wave excitation using solenoid antenna.
Physics Letters A,
Vol. 221,
Issue. 1-2,
p.
94.
Ellingboe, A. R.
and
Boswell, R. W.
1996.
Capacitive, inductive and helicon-wave modes of operation of a helicon plasma source.
Physics of Plasmas,
Vol. 3,
Issue. 7,
p.
2797.
Kim, Jung-Hyung
and
Chang, Hong-Young
1996.
A study on ion energy distribution functions and plasma potentials in helicon wave plasmas.
Physics of Plasmas,
Vol. 3,
Issue. 4,
p.
1462.